Each Dynavac thin film system is built for superior performance- from small batch and R&D coating systems to large-area systems with flat or multi-dimensional substrates. Our deposition sources and power supplies are selected for optimal film smoothness, density, and adhesion.
- Magnetron cathode (DC, pulsed DC and RF)
- High current thermal
- Single and multi-pocket e-beam
- End-hall ion source
- RF ion source with hollow cathode neutralizer
- RF, AC, and DC power
- Planetary and rotary magnetron sources