Each Dynavac thin film system is built for superior performance- from small batch and R&D coating systems to large-area systems with flat or multi-dimensional substrates. Our deposition sources and power supplies are selected for optimal film smoothness, density, and adhesion.

Key Features

  • Magnetron cathode (DC, pulsed DC and RF)
  • High current thermal
  • Single and multi-pocket e-beam
  • End-hall ion source
  • RF ion source with hollow cathode neutralizer
  • RF, AC, and DC power
  • Planetary and rotary magnetron sources